Qalabka iyo astaamaha kumbuyuutarrada dhoobada dhoobada

Iyada oo wata horumarka iyo horumarka teknolojiyadda, heerkulka hada, heerkulka shaqada ee hadda jira iyo inta jeer ee lagu jiro aaladaha ayaa si tartiib tartiib ah u sii kordhayay. Si loo haqabtiro ku-tiirsanaanta aaladaha iyo wareegyada, shuruudaha sare ayaa loo gudbiyey sidaha sidaha chip. Substrates dhoobada waxaa si weyn loogu isticmaalaa arimahan sababtoo ah guryahooda heerkulka kuleylka ah ee heer sare ah, astaamaha microwave, guryaha farsamada iyo isku halaynta sare.

Waqtigan xaadirka ah, agabyada dhoobada ugu weyn ee loo adeegsado substrates dhoobada waa: alumina (al2o3), aluminium nitidede (Silminon Naitride (Silnum NITIde (Silkon Canbide (Sildleum) iyo Beryllium Cande (Beryllium) iyo beroon.

ee daahirka

Ma tirial		Xadgudubka	kuleylka	(	W / km	) xoojinta	xoogagga
si	joogto	ah	ee	ehelka	ah	Codsiyada ballaaran ee ballaaran ee
'Aln'	99%	150	8.9	15	Waxqabadka Sare, Laakiin qiimaha sare
ee dhaco	99%	310	6.4	10	budo leh sunta sare ,
xadida	si	aad	u	isticmaasho	SI3N4
99	%	96	9.4	Boqolkiiba	10

Aynu aragno astaamaha gaagaaban ee 5-ta dhoobada ee horumarsan ee loogu talagalay subterates sida soo socota:

1. alumina (al2o3)

Al2o3 PolyfySTystos-ka ayaa gaari kara wax ka badan 10 nooc, noocyada waaweyn ee krystal waa sida soo socota: αo3, β-al-al-al-al2o3 iyo zta-al2o3. Waxaa ka mid ah, αo2o3 waxay leedahay waxqabadka ugu hooseeya waana kuwa ugu xasilloon ee afarta foos ee qeybta ugu weyn ee qeybta ah, unugyadeeduna waa rhomboehedron tilmaan leh, oo ka mid ah nidaamka ceyriska hexagonede. qaab dhismeedka al -2o3 waa adag yahay, qaab-dhismeedka corundum, waxaa suuragal ah oo ku filan karaa heerkulka oo dhan; Markay heerkulku gaaro 1000 ~ 1600 ° C, kala duwanaansho kale ayaa si aan kala sooc lahayn u beddeli doonaa α-al2o3.

Jaantus 1: Crystal Mictostuture ee al2O3 hoos imaad

Iyada oo kororka jajabkii ugu weynaa ee al2o3 iyo hoos u dhaca jajabkii muraayadda ee u dhigma, in la wanaajinayo kuleylka ee walxaha al -2o3 ee si dhaqso leh ayaa si dhakhso ah u kacaysa, oo markii labanlaabmayo al-12%, ayaa ah in la barbardhigo in marka la barbar dhigo marka loo eego 90%.

In kasta oo ay kordhineyso jajabyada ballaaran ee al2o3 waxay hagaajin kartaa waxqabadka guud ee dhoofinta, waxay sidoo kale kordhisaa heerkulka gunta ee dhoobada, kaas oo si aan toos ahayn u horseedaya kororka qarashka wax soo saarka.

2. aluminium nitride (ALN)

ALN waa nooc ka mid ah kooxda ⅲ-v xarunta leh qaab dhismeedka Wurtzite. Unuggeeda unugyadu waa Aln4 Tertratedron, oo ay ka tirsan tahay nidaamka hexagonal crystal waxayna leeyihiin debaaji adkeed oo xoog leh, sidaa darteed waxay leedahay guryo farsamo oo heer sare ah iyo xoog aad u wanaagsan. Muuqaal ahaan, cufnaanta kickstal waa 3.2611g / cm3, sidaa darteed waxay leedahay heer kuleyl heer sare ah, oo aln crystal saafi ah ayaa leh heerkulka kuleylka 320w / (m · k) heerkulka qolka, iyo in la wajaho kuleylka ee 'aalad-kulul' Substrate waxay gaari kartaa 150W / (M · K), oo ka badan 5 jeer oo ah Al2o3. Isku-darka kuleylka kuleylka ah waa 3.8 × 10-6 ~ 4.4 × 10-6/0-6 / ℃, kaas oo si fiican u isbarbar dhigaya kuleylka kuleylka kuleylka ee walxaha chipipip-ka semiconductor sida SI, Sic iyo Gaas.

Jaantus 2: Budada aluminium nitidede

Qalabka 'Aln' wuxuu leeyahay kala-guurka kuleylka sare marka loo eego dhoobada al2o3, kaas oo si tartiib tartiib ah u beddelanaya dhoobada al-maylka ee korantada awoodda korantada iyo aaladaha kale ee u baahan kuleylka kuleylka sare, waxayna leeyihiin rajo ballaaran. Qalabka 'Aln' waxaa sidoo kale loo tixgeliyaa inay yihiin sheyga la doorbido ee daaqadda tamarta tamarta ee aaladda korantada ee tamarta ee loo yaqaan 'elektiroonigga elektiroonigga ah' elektroonikada ka hooseeya ee elektaroonigga ah ee dib-u-dhigga.

3. Silicon Nitride (SI3N4)

SI3N4 waa xarun isku-dhafan oo isku-dhafan oo leh seddex qaab dhismeed oo kale ah: α-SI3N4, β-SI3N4, iyo γ-SI3N4. Waxaa ka mid ah, α, SI3N4 iyo β-SI3N4 waa qaababka ugu caansan ee aan caadiga ahayn, oo leh qaab-hexagonal. Wadahadalka kuleylka ee hal-ku-dhigga hal crystal Si3n4 wuxuu gaari karaa 400W / (M · K). Si kastaba ha noqotee, sababtuna tahay wareegga kuleylka, waxaa jira cilado yar oo cilladaysan ah sida meelaha banaan iyo kala-baxa dhabta ah, iyo cidhiidhiga sababihiisa oo sii kordhaya, sidaa darteed fal-galka kuleylka ee dhoobada ah ee hufnaanta ah waa qiyaastii 20w / (m · k) . Adoo wanaajinaya qaadashada iyo geedi socodka guska, dib-u-habeynta kuleylka ayaa gaadhay 106W / (M · K). Feejignaanta kuleylka kuleylka ee SI3N4 waa qiyaastii 3.0 × 10- C, oo si fiican u isbarbar dhigaya SI, SIAs Alaabtii, samaynta dhoobada ah ee 'SI3 COWNE' oo ah walxaha soo jiidashada leh ee aaladaha elektiroonigga ah ee muhaajiriinta ah.

Jaantus 3: Powder of Silicon Nitride

Ka mid ah substrates-ka dhoofinta ee jira, SI3N4 Substrates Cloumic waxaa loo tixgeliyaa inuu yahay ashyaa'da dhoobada ugu wanaagsan sida adkaanta heer sare ah, iska caabin heer sare ah iyo xasilloon yari, dhaco caabbinta, xidho iska caabbinta iyo iska caabbinta. Waqtigan xaadirka ah, waxaa lagu doorbidayaa baakadaha 'IGBBIT' oo si tartiib tartiib ah ayuu u beddelaa al2o3 iyo sunta 'Aln coneramic'.

4.silicon Carbide (Sic)

Hal Crystal SectStal Scricontors shey waa shey saddexaad, kaas oo leh faa'iidooyinka farqiga kooxeed ee weyn, korantada jabinta ee sareeya, jihada kuleylka sare iyo xawaaraha samafalka sare ee elektroonikada.

Adigoo ku daraya qadar yar oo ah be2o3 ilaa SIC si loo kordhiyo iska caabbinta, ka dibna lagu daro u dhiganta waxyaabaha kudhaqan ee heerkulka ka sarreeya, waxaad diyaarin kartaa cufnaanta in ka badan 98% dhoobada sicilka. Xadgudubka kuleylka ee dhoobada caleenta ee leh daahir kala duwan oo ay diyaarinayaan hababka gunaanaya ee kaladuwan iyo waxyaabaha lagu daro waa 100 ~ 490W / (m · k) heerkulka qolka. Sababtoo ah Dielectric Cilmiga joojinta CIC waa mid aad u ballaaran, waxay ku habboon tahay oo keliya codsiyada soo noqnoqda, oo kuma haboona codsiyada soo noqnoqda ee soo noqnoqda.

5. Beerllia (Beo)

BEA waa qaab-dhismeedka Wurttzite oo unuggu waa nidaamka crystal. Wadahadalka kuleylka ayaa aad u sarreeya, jajab ballaaran oo ah 99% dhoobada lo may, heerkulka qolka, wadooyinka kuleylka (m · (m · (m · (m k), oo ah 10 jeer oo la mid ah isku-darka al2o3 ee cilaabanaha al2o3. Kaliya ma leh awood kuleyl aad u sarreeya, laakiin sidoo kale waxay leedahay dieltric-ka joogtada ah ee joogtada ah iyo dilida-qaadka iyo xididada sare iyo astaamaha farsamada, weelasha weelka ah ee loo yaqaan 'beonics' waa sheyga korantada iyo wareegga u baahan jilbil sare.

Jaantus 5: Qaab-dhismeedka Crystal ee Beryllia

Wadahadalka kuleylka sare iyo astaamaha khasaaraha hoose ee Beo ayaa si aad ah uga soo laabtay agabyada kale ee dhoobada ah, laakiin Beo wuxuu leeyahay cillad aad u muuqda, oo budaheeda ayaa ah mid sun ah.

Waqtigan xaadirka ah, agabyada sunta dhoobada ee dhoobada ee loo isticmaalo Shiinaha ayaa inta badan ah Al2O3, ALN iyo SI3N4. Substrate-ka dhoofinta ee ay sameeyeen tikniyoolajiyadda LTCC waxay dhexgelin kartaa qaybaha aan caadiga ahayn sida caabbirka, daf-bixiyeyaasha iyo qaababka ku jira qaab-dhismeedka saddexda-cabbir leh. Marka la barbardhigo is dhexgalka is dhexgalka semiconduct, kuwaas oo ah kuwa ugu horeeya aaladda firfircoon, LTCC waxay leedahay cufnaanta sare ee 3D ee isku xirta isku-duwaha isku xidhka.